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全自動晶圓超聲波缺陷檢測系統(tǒng)

i-Wafer系列是***款高端儀器，操作人員可選擇接收/拒絕標準，手動或自動檢測晶圓。在KSI i-Wafer的探測下，晶圓中的孔隙、分層或者雜質(zhì)都能被發(fā)現(xiàn)。尺寸在450mm的多種晶圓也能進行檢測

新型KSI i-Wafer晶圓缺陷檢測系統(tǒng)的主要特點：
- 掃描速度達2000mm/s
- 新型換能器
- 高質(zhì)畫面
- 同時使用1只、2只、4只換能器提高效能
- 能發(fā)現(xiàn)只有幾微米的缺陷

German ksi-kassian i-wafer type

Automatic wafer ultrasonic defect detection system

The i-wafer series is a high-end device for which the operator has the option of receiving/rejecting the standard ａnd checking the Wafer manually or automatically.Under the detection of the KSI i-wafer, pores, layers or impurities in the Wafer can be found.A variety of wafers with a size of 450mm can also be tested